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Statistical analysis of recombination properties of the boron-oxygen defect in p-type Czochralski silicon

Nitin NAMPALLI,Tsun Hang FUNG,Stuart WENHAM,Brett HALLAM,Malcolm ABBOTT

《能源前沿（英文）》 2017年 第11卷 第1期   页码 4-22 doi: 10.1007/s11708-016-0442-6

摘要： This paper presents the application of lifetime spectroscopy to the study of carrier-induced degradation ascribed to the boron-oxygen (BO) defect. Specifically, a large data set of p-type silicon samples is used to investigate two important aspects of carrier lifetime analysis: ① the methods used to extract the recombination lifetime associated with the defect and ② the underlying assumption that carrier injection does not affect lifetime components unrelated to the defect. The results demonstrate that the capture cross section ratio associated with the donor level of the BO defect ( ) vary widely depending on the specific method used to extract the defect-specific recombination lifetime. For the data set studied here, it was also found that illumination used to form the defect caused minor, but statistically significant changes in the surface passivation used. This violation of the fundamental assumption could be accounted for by applying appropriate curve fitting methods, resulting in an improved estimate of (11.90±0.45) for the fully formed BO defect when modeled using the donor level alone. Illumination also appeared to cause a minor, apparently injection-independent change in lifetime that could not be attributed to the donor level of the BO defect alone and is likely related to the acceptor level of the BO defect. While specific to the BO defect, this study has implications for the use of lifetime spectroscopy to study other carrier induced defects. Finally, we demonstrate the use of a unit-less regression goodness-of-fit metric for lifetime data that is easy to interpret and accounts for repeatability error.

关键词： Czochralski silicon     boron-oxygen defect     injection dependent lifetime spectroscopy     goodness-of-fit     repeatability error    

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Chord error constraint based integrated control strategy for contour error compensation

Tie ZHANG, Caicheng WU, Yanbiao ZOU

《机械工程前沿（英文）》 2020年 第15卷 第4期   页码 645-658 doi: 10.1007/s11465-020-0601-7

摘要： As the traditional cross-coupling control method cannot meet the requirements for tracking accuracy and contour control accuracy in large curvature positions, an integrated control strategy of cross-coupling contour error compensation based on chord error constraint, which consists of a cross-coupling controller and an improved position error compensator, is proposed. To reduce the contour error, a PI-type cross-coupling controller is designed, with its stability being analyzed by using the contour error transfer function. Moreover, a feed rate regulator based on the chord error constraint is proposed, which performs speed planning with the maximum feed rate allowed by the large curvature position as the constraint condition, so as to meet the requirements of large curvature positions for the chord error. Besides, an improved position error compensation method is further presented by combining the feed rate regulator with the position error compensator, which improves the tracking accuracy via the advance compensation of tracking error. The biaxial experimental results of non-uniform rational B-splines curves indicate that the proposed integrated control strategy can significantly improve the tracking and contour control accuracy in biaxial contour following tasks.

关键词： cross-coupling controller     contour error     tracking error     position error compensator     feed rate regulator    

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Kinematic error separation on five-axis NC machine tool based on telescoping double ball bar

Min WANG, Jianzhong HU, Tao ZAN

《机械工程前沿（英文）》 2010年 第5卷 第4期   页码 431-437 doi: 10.1007/s11465-010-0110-1

摘要： The theory and algorithm of the homogeneous transformation matrix (HTM) method are applied in establishing the kinematic error model of five-axis machining tool with two-axis turntable. Based on this model, a new method for the kinematic error separation in five-axis numerical control (NC) machining tool is proposed. In this study, three types of simultaneous three-axis control motions are designed for each rotary axis to identify the deviations. In the measurement, two translational axes and one rotary axis are simultaneously controlled to keep a constant distance between the tool and the worktable. Telescoping double ball bar is used to measure the relative distance between the spindle and the worktable in the motion of NC machining tool. Finally, the value measured by telescoping double ball bar is substituted into the model to obtain kinematic error of NC machining tool. Comparison has confirmed that the proposed method is high precision and can be applied to effectively and conveniently measure the five-axis machining tool.

关键词： error modeling     error separation     telescoping double ball bar     five-axis numerical control (NC) machining tool    

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Robust ensemble of metamodels based on the hybrid error measure

《机械工程前沿（英文）》 2021年 第16卷 第3期   页码 623-634 doi: 10.1007/s11465-021-0641-7

摘要： Metamodels have been widely used as an alternative for expensive physical experiments or complex, time-consuming computational simulations to provide a fast but accurate analysis. However, challenge remains in the prior determination of the most suitable metamodel for a particular case because of the lack of information about the actual behavior of a system. In addition, existing studies on metamodels have largely restricted on solving deterministic problems (e.g., data from finite element models), whereas some real-life engineering problems (e.g., data from physical experiment) are stochastic problems with noisy data. In this work, a robust ensemble of metamodels (EMs) is proposed by combining three regression stand-alone metamodels in a weighted sum form. The weight factor is adaptively determined according to the hybrid error metric, which combines global and local error measures to improve the accuracy of the EMs. Furthermore, three typical individual metamodels that can filter noise are selected to construct the EMs to extend their application in practical engineering problems. Three well-known benchmark problems with different levels of noise and three engineering problems are used to verify the effectiveness of the proposed EMs. Results show that the proposed EMs have higher accuracy and robustness than the individual metamodels and other typical EMs in major cases.

关键词： metamodel     ensemble of metamodels     hybrid error measure     stochastic problem    

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具有新概念的运动误差及形状误差的分离法——虚位数据法

洪迈生,李自军,苏恒,叶飞帆

《中国工程科学》 2002年 第4卷 第10期   页码 48-51

摘要：

提出了一种基于信号重建的虚位数据法，用此方法，可以按需要任意选择只分离形状误差或只分离运动误差，或者任意安排分离这两类误差的先后顺序，而不必变更传统的形状误差检测-分离系统，方式灵活，使用方便。

关键词： 虚位数据     信号重建     形状误差     运动误差     误差分离技术    

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Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer

Lili CHEN, Wu ZHOU

《机械工程前沿（英文）》 2013年 第8卷 第2期   页码 146-149 doi: 10.1007/s11465-013-0260-z

摘要：

To predict more precisely the frequency of force-balanced micro accelerometer with different bias voltages, the effects of bias voltages on error sensitivity of frequency is studied. The resonance frequency of accelerometer under closed loop control is derived according to its operation principle, and its error sensitivity is derived and analyzed under over etching structure according to the characteristics of Deep Reaction Ion Etching (DRIE). Based on the theoretical results, micro accelerometer is fabricated and tested to study the influences of AC bias voltage and DC bias voltage on sensitivity, respectively. Experimental results indicate that the relative errors between test data and theory data are less than 7%, and the fluctuating value of error sensitivity under the range of voltage adjustment is less than 0.01 μm . It is concluded that the error sensitivity with designed parameters of structure, circuit and process error can be used to predict the frequency of accelerometer with no need to consider the influence of bias voltage.

关键词： Micro-Electro-Mechanical Systems (MEMS)     micro accelerometer     force-balanced micro accelerometer     frequency     error sensitivity    

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A frequency error estimation for isogeometric analysis of Kirchhoff–Love cylindrical shells

《结构与土木工程前沿（英文）》 doi: 10.1007/s11709-023-0006-x

摘要： A frequency error estimation is presented for the isogeometric free vibration analysis of Kirchhoff–Love cylindrical shells using both quadratic and cubic basis functions. By analyzing the discrete isogeometric equations with the aid of harmonic wave assumption, the frequency error measures are rationally derived for the quadratic and cubic formulations for Kirchhoff–Love cylindrical shells. In particular, the governing relationship of the continuum frequency for Kirchhoff–Love cylindrical shells is naturally embedded into the frequency error measures without the need of explicit frequency expressions, which usually are not trivial for the shell problems. In accordance with these theoretical findings, the 2nd and 4th orders of frequency accuracy are attained for the isogeometric schemes using quadratic and cubic basis functions, respectively. Numerical results not only thoroughly verify the theoretical convergence rates of frequency solutions, but also manifest an excellent magnitude match between numerical and theoretical frequency errors for the isogeometric free vibration analysis of Kirchhoff–Love cylindrical shells.

关键词： isogeometric analysis     Kirchhoff–Love cylindrical shell     free vibration     frequency error     convergence    

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Error measurement and assemble error correction of a 3D-step-gauge

MAO Xinyong, LI Bin, SHI Hanmin, LIU Hongqi, LI Xi, LI Peigen

《机械工程前沿（英文）》 2007年 第2卷 第4期   页码 388-393 doi: 10.1007/s11465-007-0067-x

摘要： A new artifact called 3D-step-gauge consisting of a pyramid array and a compound, is proposed to calculate geometrical errors for machine tools. Only one point on each profile of the pyramid in the array is probed, and its center coordinate can be calculated. Then, the intervals of the pyramids can be transfered a length standard to measure errors. Considering the differences in the structural parameters and the location of the pyramids, a volumetric error measurement method of discrete points is presented. Furthermore, the location errors between the calibration state and the measurement state are studied and their influences on the accuracy of the position measurement are investigated on an actual machine tool. The 3D-step-gauge was tested on an actual machine tool and the measurement result shows quick assembly, convenient measurement, and high accuracy.

关键词： volumetric     pyramid     assembly     accuracy     calibration    

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Error analysis and optimization of a 3-degree of freedom translational Parallel Kinematic Machine

null

《机械工程前沿（英文）》 2014年 第9卷 第2期   页码 120-129 doi: 10.1007/s11465-014-0300-3

摘要：

In this paper, error modeling and analysis of a typical 3-degree of freedom translational Parallel Kinematic Machine is presented. This mechanism provides translational motion along the Cartesian X-, Y- and Z- axes. It consists of three limbs each having an arm and forearm with prismatic-revolute-revolute-revolute joints. The moving or tool platform maintains same orientation in the entire workspace due to its joint arrangement. From inverse kinematics, the joint angles for a given position of tool platform necessary for the error modeling and analysis are obtained. Error modeling is done based on the differentiation of the inverse kinematic equations. Variation of pose errors along X, Y and Z directions for a set of dimensions of the parallel kinematic machine is presented. A non-dimensional performance index, namely, global error transformation index is used to study the influence of dimensions and its corresponding global maximum pose error is reported. An attempt is made to find the optimal dimensions of the Parallel Kinematic Machine using Genetic Algorithms in MATLAB. The methodology presented and the results obtained are useful for predicting the performance capability of the Parallel Kinematic Machine under study.

关键词： translational Parallel Kinematic Machine     error modeling     global error transformation index    

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New method for computer numerical control machine tool calibration: Relay method

LIU Huanlao, SHI Hanming, LI Bin, ZHOU Huichen

《机械工程前沿（英文）》 2007年 第2卷 第3期   页码 301-304 doi: 10.1007/s11465-007-0053-3

摘要： Relay measurement method, which uses the kilogram-meter (KGM) measurement system to identify volumetric errors on the planes of computer numerical control (CNC) machine tools, is verified through experimental tests. During the process, all position errors on the entire plane table are measured by the equipment, which is limited to a small field. All errors are obtained first by measuring the error of the basic position near the original point. On the basis of that positional error, the positional errors far away from the original point are measured. Using this analogy, the error information on the positional points on the entire plane can be obtained. The process outlined above is called the relay method. Test results indicate that the accuracy and repeatability are high, and the method can be used to calibrate geometric errors on the plane of CNC machine tools after backlash errors have been well compensated.

关键词： positional     volumetric     information     process     repeatability    

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Identification of thermal error in a feed system based on multi-class LS-SVM

Chao JIN, Bo WU, Youmin HU, Yao CHENG

《机械工程前沿（英文）》 2012年 第7卷 第1期   页码 47-54 doi: 10.1007/s11465-012-0307-6

摘要：

Research of thermal characteristics has been a key issue in the development of high-speed feed system. The thermal positioning error of a ball-screw is one of the most important objects to consider for high-accuracy and high-speed machine tools. The research work undertaken herein ultimately aims at the development of a comprehensive thermal error identification model with high accuracy and robust. Using multi-class least squares support vector machines (LS-SVM), the thermal positioning error of the feed system is identified with the variance and mean square value of the temperatures of supporting bearings and screw-nut as feature vector. A series of experiments were carried out on a self-made quasi high-speed feed system experimental bench HUST-FS-001 to verify the identification capacity of the presented method. The results show that the recommended model can be used to predict the thermal error of a feed system with good accuracy, which is better than the ordinary BP and RBF neural network. The work described in this paper lays a solid foundation of thermal error prediction and compensation in a feed system.

关键词： least squares support vector machine (LS-SVM)     feed system     thermal error     precision machining    

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测量与信息技术

张国雄

《中国工程科学》 2000年 第2卷 第3期   页码 62-66

摘要：

测量是获取信息的重要手段。科学研究、生产、高科技发展都离不开测量。测量技术发展的重要特点是它与信息技术的融合，这是提高测量精度、在线和动态测量、复杂参数和复杂环境下测量、智能测量的需要。这一融合贯穿始终，它包括信号调制与解调、采样与重构、信号融合、数据压缩、滤波、信号变换、时间序列分析、谱分析、数据拟合与建模、模式识别、神经网络、仿真与虚拟、误差分离、误差补偿、冗余技术、决策与智能技术等，它们互相支持。文章通过三坐标测量机误差补偿、圆度和轴系误差测量，以及大型工程的柔性坐标测量系统，介绍其在提高测量精度、优化、自标定、丢失信息自恢复、系统重组等方面的作用及其关键技术。

关键词： 测量     信息技术     误差补偿     建模     冗余技术     误差分离    

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Theoretical prediction and validation of global horizontal solar irradiance for a tropical climate in India

Sivasankari SUNDARAM,Jakka SARAT CHANDRA BABU

《能源前沿（英文）》 2015年 第9卷 第3期   页码 311-321 doi: 10.1007/s11708-015-0369-3

摘要： This paper aims to propose monthly models responsible for the theoretical evaluation of the global horizontal irradiance of a tropical region in India which is Sivagangai situated in Tamilnadu. The actual measured global horizontal irradiance hails from a 5 MW solar power plant station located at Sivagangai in Tamilnadu. The data were monitored from May 2011 to April 2013. The theoretical assessment was conducted differently by employing a programming platform called Microsoft Visual Basic 2010 Express. A graphical user interface was created using Visual Basic 2010 Express, which provided the evaluation of empirical parameters for model formulation such as daily sunshine duration ( ), maximum possible sunshine hour duration ( ), extra terrestrial horizontal global irradiance ( ) and extra terrestrial direct normal irradiance ( ). The proposed regression models were validated by the significance of statistical indicators such as mean bias error, root mean square error and mean percentage error from the predicted and the actual values for the region considered. Comparison was made between the proposed monthly models and the existing normalized models for global horizontal irradiance evaluation.

关键词： global horizontal irradiance (GHI)     mean bias error     root mean square error     mean percentage error     coefficient of regression     Visual Basic 2010 Express    

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A pre-compensation method of the systematic contouring error for repetitive command paths

D. L. ZHANG,Y. H. CHEN,Y. P. CHEN

《机械工程前沿（英文）》 2015年 第10卷 第4期   页码 367-372 doi: 10.1007/s11465-015-0367-5

摘要：

For a repetitive command path, pre-compensating the contouring error by modifying the command path is practical. To obtain the pre-compensation value with better accuracy, this paper proposes the use of a back propagation neural network to extract the function of systematic contouring errors. Furthermore, by using the extracted function, the contouring error can be easily pre-compensated. The experiment results verify that the proposed compensation method can effectively reduce contouring errors.

关键词： contouring error     pre-compensation     motion control system     back propagation (BP) neural network    

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Key point selection in large-scale FBG temperature sensors for thermal error modeling of heavy-duty CNC

Jianmin HU, Zude ZHOU, Quan LIU, Ping LOU, Junwei YAN, Ruiya LI

《机械工程前沿（英文）》 2019年 第14卷 第4期   页码 442-451 doi: 10.1007/s11465-019-0543-0

摘要： Thermal error is one of the main factors that influence the machining accuracy of computer numerical control (CNC) machine tools. It is usually reduced by thermal error compensation. Temperature field monitoring and key temperature measurement point (TMP) selection are the bases of thermal error modeling and compensation for CNC machine tools. Compared with small- and medium-sized CNC machine tools, heavy-duty CNC machine tools require the use of more temperature sensors to measure their temperature comprehensively because of their larger size and more complex heat sources. However, the presence of many TMPs counteracts the movement of CNC machine tools due to sensor cables, and too many temperature variables may adversely influence thermal error modeling. Novel temperature sensors based on fiber Bragg grating (FBG) are developed in this study. A total of 128 FBG temperature sensors that are connected in series through a thin optical fiber are mounted on a heavy-duty CNC machine tool to monitor its temperature field. Key TMPs are selected using these large-scale FBG temperature sensors by using the density-based spatial clustering of applications with noise algorithm to reduce the calculation workload and avoid problems in the coupling of TMPs for thermal error modeling. Back propagation neural network thermal error prediction models are established to verify the performance of the proposed TMP selection method. Results show that the number of TMPs is reduced from 128 to 5, and the developed model demonstrates good prediction effects and strong robustness under different working conditions of the heavy-duty CNC machine tool.

关键词： thermal error     heavy-duty CNC machine tools     FBG     key TMPs     prediction model    

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标题 作者 时间 类型 操作

Statistical analysis of recombination properties of the boron-oxygen defect in p-type Czochralski silicon

Nitin NAMPALLI,Tsun Hang FUNG,Stuart WENHAM,Brett HALLAM,Malcolm ABBOTT

期刊论文

Chord error constraint based integrated control strategy for contour error compensation

Tie ZHANG, Caicheng WU, Yanbiao ZOU

期刊论文

Kinematic error separation on five-axis NC machine tool based on telescoping double ball bar

Min WANG, Jianzhong HU, Tao ZAN

期刊论文

Robust ensemble of metamodels based on the hybrid error measure

期刊论文

具有新概念的运动误差及形状误差的分离法——虚位数据法

洪迈生,李自军,苏恒,叶飞帆

期刊论文

Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer

Lili CHEN, Wu ZHOU

期刊论文

A frequency error estimation for isogeometric analysis of Kirchhoff–Love cylindrical shells

期刊论文

Error measurement and assemble error correction of a 3D-step-gauge

MAO Xinyong, LI Bin, SHI Hanmin, LIU Hongqi, LI Xi, LI Peigen

期刊论文

Error analysis and optimization of a 3-degree of freedom translational Parallel Kinematic Machine

null

期刊论文

New method for computer numerical control machine tool calibration: Relay method

LIU Huanlao, SHI Hanming, LI Bin, ZHOU Huichen

期刊论文

Identification of thermal error in a feed system based on multi-class LS-SVM

Chao JIN, Bo WU, Youmin HU, Yao CHENG

期刊论文

测量与信息技术

张国雄

期刊论文

Theoretical prediction and validation of global horizontal solar irradiance for a tropical climate in India

Sivasankari SUNDARAM,Jakka SARAT CHANDRA BABU

期刊论文

A pre-compensation method of the systematic contouring error for repetitive command paths

D. L. ZHANG,Y. H. CHEN,Y. P. CHEN

期刊论文

Key point selection in large-scale FBG temperature sensors for thermal error modeling of heavy-duty CNC

Jianmin HU, Zude ZHOU, Quan LIU, Ping LOU, Junwei YAN, Ruiya LI

期刊论文